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VPT has spare parts and maintenance kits specifically engineered for your system needs.  Parts are also available to upgrade or retrofit your existing vacuum chamber.

 

Spare Parts

To keep your vacuum system in peak operating condition, VPT makes a wide range of spare parts available. We can even provide you with a maintenance kit specifically engineered for your systems needs—routine preventative maintenance is key to continued trouble-free operation of your high vacuum system.

VPT spare parts are available to keep your deposition system

Parts are also available to upgrade or retrofit your existing vacuum chamber. You can either choose to have your own maintenance team do the work, or bring in VPT’s trained personnel. Whatever the need, VPT is here to help, from replacing the bearings in your planetary system to a complete system overhaul.

For a complete list of spare parts and component assemblies available from VPT, see our Spare Parts and Component Assemblies pdfs. 

 

 

 

Spare Parts and Components 

Publication  
Dome Substrate Carriers and Dome Segments pdf lfor VPT publications
Electro-Pneumatic Shutter Assembly pdf lfor VPT publications
Quartz Heater Lamp Assembly pdf lfor VPT publications
Spare Parts-Componenet Assmeblies pdf lfor VPT publications